Method and apparatus for observing inside structur

专利名称：Method and apparatus for observing inside

structures, and specimen holder

发明人：Shohei Terada,Kazutoshi Kaji,Shigeto

Isakozawa

申请号：US10912148申请日：20040806公开号：US07462830B2公开日：20081209

专利附图：

摘要：An object of the invention is to provide a method and apparatus for observinginside structures and a specimen holder, wherein aging degradation of a good sample to

a bad sample can be tracked in the same field of view, using the same specimen in orderto determine the mechanism of failure. The present invention is a method for observinginside structures. The method comprises irradiating a specimen with a corpuscular beamgenerated from a corpuscular beam source, detecting transmitted particles transmittedby the specimen, applying a voltage to a portion of the specimen, and observing of adetection status of the transmitted particles in the voltage-applied portion as needed.

申请人：Shohei Terada,Kazutoshi Kaji,Shigeto Isakozawa

地址：Hitachi JP,Hitachi JP,Hitachinaka JP

国籍：JP,JP,JP

代理机构：Dickstein Shapiro LLP

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