TRANSPORT METHOD

专利名称：TRANSPORT METHOD发明人：HOCHHOLZER, Klaus申请号：EP15790509.2申请日：20151030公开号：EP32124B1公开日：20180829

摘要：A transport apparatus has a transport device which is designed to supporttransport along a transport path of an article to be transported, wherein the article to betransported is a semiconductor wafer, a glass panel or a polymer sheet, and at least oneflexible roller for holding the article to be transported against the transport device. Theflexible roller has a hub and a roll-off ring which is mounted on the hub in a flexiblemanner by way of a plurality of spokes distributed around the circumference of the hub.Each of the spokes has a first segment, which is attached to the hub, a second segment,which is attached to the roll-off ring, and a third segment between the first segment andthe second segment, which is at a greater inclination with respect to the radial directionthan the first and the second segment.

申请人：Singulus Technologies AG,SINGULUS TECH AG,SINGULUS TECHNOLOGIES AG

地址：DE

国籍：DE

代理机构：Stöckeler, Ferdinand

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