专利名称:PACKAGE SUBSTRATE AND METHOD OF
FORMING THE SAME
发明人:Yu-Hua CHEN,Wei-Chung LO,Dyi-Chung
HU,Chang-Hong HSIEH
申请号:US13966045申请日:20130813
公开号:US20140117557A1公开日:20140501
专利附图:
摘要:A package substrate and a method for forming the package substrate aredisclosed. The package substrate includes an interposer having a plurality of conductive
through vias and a first insulating layer formed on the sidewalls of the conductivethrough vias, a second insulating layer formed on one side of the interposer, and aplurality of conductive vias formed in the second insulating layer and electricallyconnected to the conductive through vias. By increasing the thickness of the first
insulating layer, the face diameter of the conductive through vias can be reduced, and thelayout density of the conductive through vias in the interposer can thus be increased.
申请人:UNIMICRON TECHNOLOGY CORPORATION,INDUSTRIAL TECHNOLOGYRESEARCH INSTITUTE
地址:Taoyuan TW,Hsinchu TW
国籍:TW,TW
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