Apparatus and method for manufacturing laminated s

专利名称：Apparatus and method for manufacturing

laminated substrate

发明人：Yoshimasa Miyajima,Ariyoshi Shibata,Joji

Hasegawa,Tetsuji Kadowaki

申请号：US10935240申请日：20040908

公开号：US20050199346A1公开日：20050915

专利附图：

摘要：An apparatus for manufacturing a laminated substrate with a simple structureand with satisfactory yield. First and second holding plates each attract substrates

without contacting a laminating surface of the two substrates. A substrate conveyingdevice conveys the substrates into the processing chamber. The substrate conveyingdevice attracts only the surface of a substrate that is opposite to the laminating surface,transfers the substrate to a holding plate, and receives the substrate from the holdingplate.

申请人：Yoshimasa Miyajima,Ariyoshi Shibata,Joji Hasegawa,Tetsuji Kadowaki

地址：Kasugai JP,Kasugai JP,Kasugai JP,Kasugai JP

国籍：JP,JP,JP,JP

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