专利名称:Apparatus and method for manufacturing
laminated substrate
发明人:Yoshimasa Miyajima,Ariyoshi Shibata,Joji
Hasegawa,Tetsuji Kadowaki
申请号:US10935240申请日:20040908
公开号:US20050199346A1公开日:20050915
专利附图:
摘要:An apparatus for manufacturing a laminated substrate with a simple structureand with satisfactory yield. First and second holding plates each attract substrates
without contacting a laminating surface of the two substrates. A substrate conveyingdevice conveys the substrates into the processing chamber. The substrate conveyingdevice attracts only the surface of a substrate that is opposite to the laminating surface,transfers the substrate to a holding plate, and receives the substrate from the holdingplate.
申请人:Yoshimasa Miyajima,Ariyoshi Shibata,Joji Hasegawa,Tetsuji Kadowaki
地址:Kasugai JP,Kasugai JP,Kasugai JP,Kasugai JP
国籍:JP,JP,JP,JP
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