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Apparatus and method for manufacturing laminated s

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专利名称:Apparatus and method for manufacturing

laminated substrate

发明人:Yoshimasa Miyajima,Ariyoshi Shibata,Joji

Hasegawa,Tetsuji Kadowaki

申请号:US10935240申请日:20040908

公开号:US20050199346A1公开日:20050915

专利附图:

摘要:An apparatus for manufacturing a laminated substrate with a simple structureand with satisfactory yield. First and second holding plates each attract substrates

without contacting a laminating surface of the two substrates. A substrate conveyingdevice conveys the substrates into the processing chamber. The substrate conveyingdevice attracts only the surface of a substrate that is opposite to the laminating surface,transfers the substrate to a holding plate, and receives the substrate from the holdingplate.

申请人:Yoshimasa Miyajima,Ariyoshi Shibata,Joji Hasegawa,Tetsuji Kadowaki

地址:Kasugai JP,Kasugai JP,Kasugai JP,Kasugai JP

国籍:JP,JP,JP,JP

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