专利名称：Method and apparatus for the recovery and
re-use of process gases
发明人：Walter H. Whitlock申请号：US115928申请日：20061114
公开号：US20080110743A1公开日：20080515
专利附图：
摘要：The present invention relates to methods and systems for processing anexhaust stream containing a recyclable component mixed with other components andimpurities to produce a high purity product that contains all of the recyclable
component. One or more waste streams containing none of the recyclable componentare also produced. The present invention particularly relates to the recovery of valuablerecyclable components used in the manufacture of semiconductor devices.
申请人：Walter H. Whitlock
地址：Chapel Hill NC US
国籍：US
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