专利名称：Electrostatic and magnetic lens for
corpuscular beam apparatus
发明人：FROSIEN, JURGEN, DR.,PLIES, ERICH, DR.申请号：EP87104111.7申请日：19870320公开号：EP0242602A3公开日：19890906
摘要：a erfindungsgem\ä\ße product magnetic lens consists of asymmetrical or unsymmetrischen magnetlinse (ml), an electrostatic
immersions\linse overlays.an electrode (re) of the immersions\linse is in theform of a hohlzylinders ausgebil\det in the upper polschuh (op) of the magnetlinse(ml) arranged concentrically to the axis of symmetry (oa) arranged and up to the area ofthe polschuhspaltes (sp)).the lower polschuh (up) the magnetlinse (ml), preferably on theground and to protect against contamination with a strahlf\ührungsrohr (sf) ofmagnetic material or unmagnetischem addition can be, is the lower electrode of theelectrostatic in erfindungsgem\ä\ß mersionslinse.
申请人：SIEMENS AKTIENGESELLSCHAFT
地址：Klausnerring 1a D-85551 Kirchheim DE
国籍：DE
代理机构：Tetzner, Volkmar, Dr.-Ing. Dr. jur.
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