Electrostatic and magnetic lens for corpuscular be

专利名称：Electrostatic and magnetic lens for

corpuscular beam apparatus

发明人：FROSIEN, JUERGEN, DR.,PLIES, ERICH, DR.申请号：EP87104111.7申请日：19870320公开号：EP0242602B1公开日：19930721

摘要：a erfindungsgem\ä\ße product magnetic lens consists of asymmetrical or unsymmetrischen magnetlinse (ml), an electrostatic

immersions\­linse overlays.an electrode (re) of the immersions\­linse is in theform of a hohlzylinders ausgebil\­det in the upper polschuh (op) of the magnetlinse(ml) arranged concentrically to the axis of symmetry (oa) arranged and up to the area ofthe polschuhspaltes (sp)).the lower polschuh (up) the magnetlinse (ml), preferably on theground and to protect against contamination with a strahlf\ührungsrohr (sf) ofmagnetic material or unmagnetischem addition can be, is the lower electrode of theelectrostatic in erfindungsgem\ä\ß mersionslinse.

申请人：ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER

HALBLEITERPRUEFTECHNIK MBH,ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFTFUER HALBLEITERPRUEFTECHNIK MBH

地址：KLAUSNERRING 1A; W-8011 HEIMSTETTEN,KLAUSNERRING 1A; W-8011HEIMSTETTEN

代理机构：Tetzner, Volkmar, Dr.-Ing. Dr. jur.

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