Apparatus and method for inhibiting decomposition

专利名称：Apparatus and method for inhibiting

decomposition of germane

发明人：Jose Arno,Edward Sturm,Luping Wang,James

Dietz

申请号：US10282377申请日：20021029公开号：US06716271B1公开日：20040406

专利附图：

摘要：A germane storage and dispensing system, in which germane gas is sorptivelyretained on an activated carbon sorbent medium in a vessel containing adsorbed and free

germane gas. The activated carbon sorbent medium is deflagration-resistant in relationto the germane gas adsorbed thereon, i.e., under deflagration conditions of 65° C. and650 torr, under which free germane gas undergoes deflagration, the activated carbonsorbent medium does not sustain deflagration of the adsorbed germane gas orthermally desorb the germane gas so that it undergoes subsequent deflagration. Thedeflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and bymaintaining the fill level of the sorbent medium in the gas storage and dispensing vesselat a substantial value, e.g., of at least 30%.

申请人：ADVANCED TECHNOLOGY MATERIALS, INC.

代理人：Margaret Chappuis,Steven J. Hultquist,William F. Ryann

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