专利名称:LOW REFLECTANCE FILM-CARRYING
SUBSTRATE
发明人:SUZUKI, TADAKATSU申请号:EP97903608申请日:19970226公开号:EP0901032A4公开日:20000112
摘要:A low-reflective thin-film substrate comprising a transparent glass substratehaving formed by sputtering a thin film in multilayer containing no chromium seriescomponent and made up of at least one kind of Ni, Fe, Co, Mo, W, Ta, Cu, and Nb as amain constituent form or as an alloy thereof, the thin film having a minimum reflectivity of0.5% or lower and the optical density of at least 4 or having a minimum reflectivity of0.1% or lower, a maximum reflectivity of 2.0% or lower, an average reflectivity of 0.3% orlower, and an optical density of at least 4.0, in the visible light region. The low-reflectivethin-film substrate is useful as a black matrix for a color filter substrate of a liquid crystalpanel, etc., and is free from an environmental pollution caused by the use of a chromiumcomponent as the target material.
申请人:KURAMOTO SEISAKUSHO CO., LTD.
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