High sensitivity thermal radiation detection with

专利名称：High sensitivity thermal radiation detection

with an emission microscope with roomtemperature optics

发明人：Neeraj Khurana,Prasad Sabbineni,Andrew

Sabersky

申请号：US10397914申请日：20030325公开号：US06825978B2公开日：20041130

专利附图：

摘要：A light emission microscope includes a low temperature detector array which

receives light through a room temperature projection optics system from a device undertest. A cold aperture including a movable cold stop and a cryogenic filter absorbsunwanted thermal radiation emitted by the optics system. In one embodiment, a highresolution CCD camera can be used with the low temperature detector array and camerawith a computer-controlled mirror providing emitted light to both cameras.

申请人：HYPERVISION, INC.

代理机构：Beyer Weaver & Thomas, LLP

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