DEVICE AND METHOD FOR THE CHARACTERIZATION OF THE

专利名称：DEVICE AND METHOD FOR THE

CHARACTERIZATION OF THE SURFACE OFAN ASPHERIC DIFFRACTIVE STRUCTURE

发明人：SCOTT, Paul James申请号：EP10779030.5申请日：20101101公开号：EP2494306A1公开日：20120905

摘要：A method of characterising the surface of an aspheric diffractive structureincludes using a metrological apparatus to perform a measurement on the surface of thestructure so as to provide a measurement profile representing the z-direction deviationsof the surface of the structure; determining parameters relating to the aspheric anddiffractive components of the aspheric diffractive structure; producing data having thedetermined parameters; and comparing the produced data with the measurement profileto determine residual error data.

申请人：Taylor Hobson Limited

地址：2 New Star Road Leicester, Leicestershire LE4 9JQ GB

国籍：GB

代理机构：Clark, Jane Anne

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