spd型压力传感器数据手册

Smartec Pressure Sensor

Features

* Commercial grade

* DIP version for high volume production * Gauge or absolute pressure * Resistive bridge technology * Voltage or current excitation

Applications * Medical applications * Blood pressure * Portable Gauges * Process control * HVAC controls

Product description

The Smart Pressure Device SPD series of pressure sensors are silicon based and encapsulated in modified plastic Dual In Line packages, to accommodate six pins for through-board printed circuit mounting. The sensors come in two distinct types: Gauge and absolute. The gauge type merely measures the pressure with respect to the

atmospheric pressure. The absolute type contains a reference vacuum chamber, which is formed on the die during manufacturing.

The output voltages of both types are proportional to the pressure that is measured.

Various pressure ranges are available. On request, other ranges and encapsulations can be supplied. Please contact our sales department for more information.

Because of it’s bridge resistance value, the SPD pressure sensor is especially suited for use in combination with the Universal Transducer Interface (UTI03), which gives an easy and very accurate interface to a digital environment.

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Specifications Version 1.0 SPD series

SPD series Performance Characteristic at Vcc =5V excitation @ 25 °C.

Parameter Min 0 0 -50 -27 -7 23 -0.3 Typ 5 1.5 0 -22 28 ±0.1 ±0.2 1 3.3 Max 10 3.0 50 -17 +7 33 +0.3 0.15 ±0.5 4.0 1.35 Units. Volts mA mV %FS/100°C %FS/100°C %FS/100°C %FS % of Range FSO ms KΩ Bar Excitation Voltage Excitation Current Offset Temp Coeff Span Temp Coeff Offset Temp Coeff Resistance Linearity Hysteresis Repeatability ) Response time (10-90%) Bridge resistance Pressure overload 1 2.7 Operating temperature -20 85 °C Storage temperature -30 125 °C 16

) measured after 1,000 temp. cycles 0 – 70 °C, 10 pressure cycles (10-90% FS)

Type Range (Bar) Min 005G 015G 030G 100G 0 - 0.350 0 - 1 0 - 2 0 - 6.5 70 100 120 120 Typ(FS) 100 140 160 190 Max 130 175 200 240 Unit mV mV mV mV 1 Pa = 0.145. 10 –3 PSI or 1 PSI = 6.476*103 Pa 1 Bar = 105 Pa = 105 N/m2

Understanding the specifications

The available range of SPD series pressure sensors allows for a wide range of applications. In order to get good results, it is very important to fully understand the meaning of the various specifications and their effects on accuracy, especially the ones that deal with temperature coefficients. (Silicon resistors are very temperature dependent).

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Specifications Version 1.0 SPD series

Excitation voltage

The excitation of the sensor can be AC or DC. Specifications are given with a DC excitation of 5V. In order to avoid electrical breakdown it is advised not to exceed the maximum values given.

Offset

The offset value is the electrical output voltage (imbalance) of the

pressure sensor when zero pressure is applied. The offset value for the absolute type is determined by extrapolating the measured values at two different pressures (atmospheric air and 0.05 Bar). The pressure in reference chamber is about 25 mTorr (3.33 Pa).

Temperature coefficients

Silicon resistors are very temperature dependent. The overall drift of the resistors is not of interest to most users (The bridge resistors are

located on the same die). The temperature coefficients of the offset and span, however, are very important. All the temperature coefficients are given in percentage of full-scale range (FS) and over a temperature range of 100 °C.

The maximum value of the temperature coefficient of the span is minus 27%, which means that worst case the span becomes 27% smaller over the full temperature range of 100 °C. The offset will vary no more than ±7% of the span over the same temperature range.

Calculation example (please refer to the parameter table above) Suppose the use of a pressure sensor of type SPD 015G over a

temperature range of 100 °C. The typical full scale span is 140 mV. The offset (at a fixed temperature) will be between -50 and +50 mV.

Offset When the static part of the offset has been nulled, the offset can still vary ±7% of 140 mV (± 9.8 mV), over the temperature range of 100°C.

Span

The typical full-scale span is 140 mV and the typical temperature coefficient of the span equals –22 %FS/100 °C.

Typically, you would therefore have a span, which varies between 140 mV and 109 mV (140 mV minus 22%), over the full temperature range of 100 °C.

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Specifications Version 1.0 SPD series

In the worst case scenario the minimum value of the span is 100 mV, which means that the sensor has a span of 100 mV, which could drop to 63mV (100 minus 27%) over the full temperature range of 100 °C.

Linearity

The linearity is defined as the maximum deviation from the best fitted straight line.

Outline drawings and dimensions. 12

pressure port ( ∅∅ 0.8)

1 2 3

Connection diagram (Top View)

Other encapsulations on request.

Ordering information

Part no. SPD005G SPD015G SPD030G SPD100G SPD015A

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Pressure range 0 – 0.35 Bar (Gauge) 0 – 1.0 Bar - 0 – 2.0 Bar - 0 – 6.5 Bar -

0 – 1.0 Bar (Absolute)