A method of manufacturing a field emission cathode

专利名称：A method of manufacturing a field emission

cathode structure

发明人：ジマールマン、ステイブン、マイケル申请号：JP特願平2-515595申请日：19901017公开号：JP第2602584号B2公开日：19970423

摘要：The present invention relates generally to new structures for a field emissioncathode and processes for fabricating the same. The field emission is made of anymaterial that is capable of emitting electrons under the influence of an electricalpotential. A process for making one embodiment of the invention includes the steps offorming a hole (15) in a substrate (5), depositing a first material (20) in said hole to form acusp (21), depositing an electron emitting material (30) to fill at least partly said cusp andremoving the first material to expose a portion (31) of the electron emitting material. Thefield emission cathode has several unique three dimensional structures. The basicstructure comprises a layer of material with cathode tips. For a more complex structurethe cathode tip is preferably accurately aligned inside an extraction/control electrodestructure, in preferably a vacuum environment. The structures of this invention can befabricated to be connected to other similar field emission cathodes or to other electronicdevices.

申请人：インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン

地址：アメリカ合衆国10504、ニユーヨーク州 アーモンク (番地なし)

国籍：US

代理人：合田 潔 (外2名)

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